P R O D U C T S
313nm Narrow linewidth laser
Based on single frequency seed laser,low noise fiber amplifier and high efficiency frequency convert technique, Precilasers can provide narrow linewidth 313nm CW lasers，maximum output power is 2W,features with high frequency stability,long life and good beam quality.
Features
- Narrow Linewidth
- High Power
- Good Beam Quality
- Never Mod Hop
Application
- Precision Measurement
- Wafer Metrology
- Interference Lithography
Main parameters
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Specification |
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Partnumber |
FL-SF-313-Y-CW |
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Wavelength |
313nm |
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Linewidth(100 us integration ) |
<40kHz |
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Operational Mode |
CW |
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Output Power |
>300mW |
>1W |
>2W |
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Beam Diameter |
1±0.15 mm |
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Beam Waist Location |
output aperture±0.5m |
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Beam Divergence (full angle) |
<0.6mrad |
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Beam Circularity |
0.9-1.1 |
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Beam Pointing Stability (P-P) |
<50μrad@3h |
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Beam Quality |
TEM00，M²<1.2 |
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Polarization |
linear, Vertical, ±3°, >20dB |
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Power Stability |
<0.75% @3hours, RMS |
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Relative Intensity Noise |
<0.2%(RMS, 10Hz-10MHz integration) |
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Cooling |
Water cooling |
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Warm-Up Time |
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Cold Start |
<2 hours |
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Warm Start |
<15 minutes |
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Demension and Weight |
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Controller Size |
≤483mm x 520mm x 132mm |
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Laser Head Size |
≤390mm x 310mm x 130mm |
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Chiller Size |
≤58cm x 29cm x 52cm |
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Laser Head Weight |
≤18kg |
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Controller Weight |
≤20kg |
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Chiller Weight |
≤25kg |
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Cable Length Between Laser And Controller |
fiber length>1.5m |
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Environment and Power Supply |
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Operating Temperature（No condensing） |
15-35 ℃（water cooling） |
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Power Supply |
100V-240V, AC, 50/60Hz |
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Power Consumption |
<170W |
<200W |
<240W |
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Communication |
RS422 |
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Higher power, more wavelengths, customizable solutions
