Wafer measurement Wafer measurement

Wafer measurement

Precilasers' high-performance industrial lasers have the characteristics of narrow linewidth, high power, and long life, and can be used for advanced industrial applications such as semiconductor wafer inspection, wafer measurement, and holographic exposure. We can also provide customized product development solutions to help your scientific research, development, and production.

Wafer measurement-Continuous laser

Real photosWavelengthPowerIntroductionFeatures
266nm
0.03W
0.1W
0.5W
1W
Based on the quadruple frequency solution, it outputs high-power continuous deep ultraviolet laser, which is suitable for semiconductor precision detection, measurement and other applications
  • High power
  • Narrow linewidth
  • Long life
313-325nm
0.3W
1W
2W
Based on high-power, low-noise fiber amplification and frequency summing technology, high-power narrow-linewidth laser output is achieved
  • High power
  • Narrow linewidth
  • Long life
355nm
0.02W
0.03W
Based on a single-pass triple frequency scheme, it outputs ultraviolet laser light, suitable for applications such as interference exposure
  • Stable structure
  • Long coherent
  • Long life
355nm
0.5W
2W
4W
Based on the resonant frequency doubling solution, it outputs high-power ultraviolet laser, which is suitable for applications such as interference exposure.
  • High power
  • Long coherent
  • Long life

 
532nm
20W
40W
60W
80W
Based on high-power, low-noise ytterbium-doped fiber amplification and frequency doubling technology, high-power narrow-linewidth laser output with a central wavelength of 532nm is achieved.
  • High power
  • Narrow linewidth
  • Long life

Wafer measurement-Quasi-continuous laser

Real photosWavelengthPowerIntroductionFeatures
266nm1-5WAdopt solid state amplification solution to achieve high repetition rate and high power output, suitable for precision detection
  • High power
  • Excellent beam quality
  • High power stability
  • High repetition rate
355nm1-8WAdopt solid state amplification solution to achieve high repetition rate and high power output, suitable for precision detection
  • High power
  • Excellent beam quality
  • High power stability
  • High repetition rate